MEMS Devices: Optical MEMS, RF MEMS, MEMS physical sensors (accelerometers, gyroscopes, pressure sensors, gas sensors, temperature sensors), microfluidics (microfluidic guidance, microsensors, etc.); MEMS actuators; MEMS energy technologies (fuel cells, microgenerators, etc.); highly integrated MEMS systems (CMOS/MEMS, LSI/MEMS integration)

MEMS Foundry Services: Simulation and design, prototype testing, product development, mass production; additional foundry services: patterning, thin-film deposition, laser processing, ion-beam machining, sputtering

MEMS Applications: End products (microphones, displays, etc.); ultra‑miniature robotic devices, microfactories, etc.; sensor networks; energy harvesting

MEMS Manufacturing Equipment: Thin‑film fabrication (vapor deposition, sputtering, CVD, plating; exposure systems, etching technologies; anti‑corrosion treatments; etching; wafer bonding; dicing; chip processing; wire bonding; packaging; micro‑forming (injection molding, hot pressing); other manufacturing equipment

Analysis and Testing Instruments: Light‑intensity defect inspection, package‑level testing, surface analysis instruments, roughness meters, scanning electron microscopes, thin‑film thickness measurement systems; microscopes: optical microscopes, electron microscopes, probe microscopes, energy‑dispersive X‑ray spectrometers; leak‑testing instruments, electrostatic negative‑ion air purifiers; gas analysis and detection, analytical and measurement systems

Nanomechanical Microfabrication Technologies: Ultra‑precision nanomechanical processes; ultra‑precise machining and microfabrication; surface micro‑machining; fine drilling; microscopic cutting; laser and ion‑beam processing; focused ion beam systems; micro‑discharge machining; ultrasonic equipment, etc.

Materials: Piezoelectric thin‑film materials (ZnO, AlN, PZT), pressure‑resistant materials, adhesion promoters, protective coatings; carbon nanotubes, sapphire, polymers, ceramics; SiC; magnetic materials, ferroelectric materials

Nanoimprint Technology: Micro‑ and nano‑scale molds; nanoimprint manufacturing equipment

Biotechnology and Medical Applications: MEMS applications in medical treatment and diagnostics, DDS, nanocapsules; cutting-edge DNA and RNA technologies, microreactors, microfluidic guidance, bio/chemical MEMS (DNA/RNA technologies, chemical sensing), etc.