China MEMS Manufacturing Conference展商名录/电子会刊

MEMS Devices: Optical MEMS; RF MEMS; MEMS Physical Sensors (accelerometers, gyros, pressure sensors, gas sensors, temperature sensors); Micro Fluidics (microfluidic channels, microsensors, etc.); MEMS Actuators; MEMS Power Generation (fuel cells, micro-generators, etc.); High-Integration MEMS (CMOS/MEMS, LSI/MEMS, Integrated MEMS).

MEMS Foundry Services: Simulation Design, Prototype Testing, Product Development, Mass Production; Other Foundry Services: Pattern Formation, Thin Film Formation, Laser Processing, Ion Pulse Processing, Sputtering.

MEMS Applications: Products (microphones, displays, etc.); Super Miniature Robotics, Micro Factories, etc.; Sensor Networks; Energy Harvesting.

MEMS Processing Equipment: Thin Film Formation (PVD, CVD, ALD, Electroplating); Exposure Systems, Etching Technologies; Corrosion Resistance Treatment; Etching; Wafer Bonding; Dicing; Chip Wire Bonding; Packaging; Microforming (Injection Molding, Hot Press); Other Production Equipment.

Analysis and Detection Instruments: Optical Defect Inspection, Packaging Inspection, Surface Analysis Instruments, Roughness Meters, Scanning Electron Microscopes, Thin Film Thickness Measurement Systems; Microscopes: Optical Microscopes, Electron Microscopes, Probe Microscopes, Electron Spectrometers; Leak Detection Instruments, Electrostatic Negative Ion Air Purification Machines; Gas Analysis and Detection, Analysis and Measurement Systems.

Nanomechanical Microfabrication Technology: Ultra-Precision Nanomechanical Processes; Ultra-Precision Machining, Microfabrication; Surface Micromachining; Fine Drilling; Microcutting; Laser, Ion Pulse Processing; Focused Ion Beam Systems; Micro Electrical Discharge Machining; Ultrasonic Equipment, etc.

Materials: Piezoelectric Film Materials (ZnO, AIN, PZT), Pressure-Resistant Materials, Adhesive Materials, Protective Materials; Carbon Nanotubes, Sapphire, Polymers, Ceramics; LTCC Substrates, Glass Substrate, SiC; Magnetic Materials, Ferroelectric Materials.

Nanoimprint Technology: Micro-Nano Models; Nanoimprint Production Equipment.

Biotechnology and Medical Applications: MEMS applications in medical treatment and diagnosis, DDS, nanocapsules; Advanced DNA & RNA technology, microreactors, microfluidic channels, biological/chemical MEMS (DNA/RNA technology, chemical detection), etc.