MEMS Devices: Optical MEMS, RF MEMS, MEMS physical sensors (accelerometers, rate/gyro sensors, pressure sensors, gas sensors, temperature sensors), microfluidics (micro-flow control, microsensors, etc.); MEMS actuators; MEMS power/energy (fuel cells, micro-generators, etc.); highly integrated MEMS (CMOS/MEMS, LSI/MEMS integration)

MEMS Foundry Services: Simulation & design, prototype testing, product development, mass production; Other foundry services: patterning, thin-film deposition, laser processing, ion beam processing, sputtering/coating

MEMS Applications: Products (microphones, displays, etc.); ultra-micro robotic devices, micro-factories, etc.; sensor networks; energy harvesting

MEMS Processing Equipment: Thin-film formation (vapor deposition, sputtering, CVD, plating); exposure systems, etching technologies; anti-corrosion treatment; dicing; wafer bonding; cutting; chips; wire bonding; packaging; micro-molding (injection, hot embossing); other production equipment

Analysis & Testing Instruments: Optical defect inspection, packaging inspection, surface analysis instruments, roughness testers, scanning electron microscopes (SEM), thin-film thickness measurement systems; Microscopes: optical microscopes, electron microscopes, probe microscopes, electron spectrometers; leak detectors, electrostatic negative ion air purifiers; gas analysis & detection, analysis & measurement systems

Nano-Mechanical Micro-Processing Technologies: Ultra-precision nano-mechanical processes; ultra-precision machining, micro-manufacturing; surface micromachining; fine drilling; micro-cutting; laser & ion beam processing; focused ion beam (FIB) systems; micro-EDM; ultrasonic equipment, etc.

Materials: Piezoelectric thin-film materials (ZnO, AlN, PZT), stress-resistant materials, adhesion materials, protective materials; carbon nanotubes, sapphire, polymers, ceramics; SiC; magnetic materials, ferroelectric materials

Nanoimprint Lithography (NIL) Technology: Micro/nano molds; nanoimprint production equipment

Biotechnology & Medical Applications: MEMS applications in medical treatment & diagnostics, DDS (Drug Delivery Systems), nanocapsules; cutting-edge DNA & RNA technologies, microreactors, microfluidics, bio/chemical MEMS (DNA/RNA tech, chemical detection), etc.